SIMS analysis equipment - メーカー・企業と製品の一覧 | イプロス

[Example of TOF-SIMS] Analysis of Li

It is possible to detect with high sensitivity! We present a case comparing the analysis of Li using TOF-SIMS and SEM-EDX.

We will introduce a case comparing the analysis of lithium (Li) using TOF-SIMS and SEM-EDX. While SEM-EDX is used for the analysis of contamination and foreign substances, detecting Li with general EDX, excluding windowless EDX, is difficult. On the other hand, TOF-SIMS can detect Li with high sensitivity. Please feel free to contact us if you need assistance. 【Overview】 ■ Analysis of stains on copper plates ■ SEM-EDX analysis → Difficult to detect Li ■ TOF-SIMS analysis → Li detectable *For more details, please refer to the PDF materials or feel free to contact us.